Rami Arieli: "The
Laser Adventure" Chapter 6.1.8, Eximer lasers page 2
Historic Development of Eximer Lasers
The Excimer laser was invented in 1971 in the USSR by a group of scientists:
Basov, Danilychev, and Popov. They showed stimulated emission at a wavelength
of 172 [nm] from Xe2 gas at low temperature, pumped by a beam
of electrons.
The first laser action in a noble gas with halogen (XeBr) was reported
in 1975 by Searl and Hart.
The common Excimer lasers
are listed in the table, each with its characteristic wavelengths:
|
Excimer Laser
|
Wavelengths [nm]
|
|
ArCl
|
175
|
|
ArF
|
193
|
|
KrF
|
248, (275)
|
|
Xef
|
351, 353, (460)
|
|
KrCl
|
222, (240)
|
|
XeCl
|
308, 351
|
|
XeBr
|
282, (300)
|