Rami Arieli: "The Laser Adventure" Chapter 6.1.8, Eximer lasers page 2
Historic Development of Eximer Lasers
The Excimer laser was invented in 1971 in the USSR by a group of scientists: Basov, Danilychev, and Popov. They showed stimulated emission at a wavelength of 172 [nm] from Xe2 gas at low temperature, pumped by a beam of electrons.

The first laser action in a noble gas with halogen (XeBr) was reported in 1975 by Searl and Hart.

The common Excimer lasers are listed in the table, each with its characteristic wavelengths:

Excimer Laser
Wavelengths [nm]
ArCl
175
ArF
193
KrF
248, (275)
Xef
351, 353, (460)
KrCl
222, (240)
XeCl
308, 351
XeBr
282, (300)